Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762281 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2023-09-19 |
| 11754918 | Pellicle and pellicle assembly | David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more | 2023-09-12 |
| 11686997 | Metal-silicide-nitridation for stress reduction | Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom +4 more | 2023-06-27 |