Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774868 | Image sensor for immersion lithography | Johan Franciscus Maria Beckers, Peter Brakhage, Arend Johannes Donkerbroek, Daniel N. Grimm, Tim Rathje +2 more | 2023-10-03 |
| 11762281 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Michiel Blauw, Derk Servatius Gertruda Brouns, Paul Janssen +17 more | 2023-09-19 |