Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774868 | Image sensor for immersion lithography | Nirupam Banerjee, Johan Franciscus Maria Beckers, Arend Johannes Donkerbroek, Daniel N. Grimm, Tim Rathje +2 more | 2023-10-03 |