Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796921 | Method and lithograph apparatus for measuring a radiation beam | Yassin Chowdhury, Maurice Henricus Franciscus Janssen | 2023-10-24 |
| 11774868 | Image sensor for immersion lithography | Nirupam Banerjee, Johan Franciscus Maria Beckers, Peter Brakhage, Daniel N. Grimm, Tim Rathje +2 more | 2023-10-03 |