Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762281 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2023-09-19 |
| 11673169 | Membrane cleaning apparatus | Andrey Nikipelov, Dmitry KURILOVICH, Fabio SBRIZZAI, Ties Wouter VAN DER WOORD, Willem Joan Van Der Zande +2 more | 2023-06-13 |