Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556063 | Substrate support, lithographic apparatus and loading method | Johannes Onvlee, Antonius Franciscus Johannes De Groot, David Ferdinand Vles | 2023-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556063 | Substrate support, lithographic apparatus and loading method | Johannes Onvlee, Antonius Franciscus Johannes De Groot, David Ferdinand Vles | 2023-01-17 |