Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789373 | Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method | Bas JANSEN, Samer Abdelmoeti Abuzeid Abdelmoeti, Koen Johan Frederik Loonen, Aditya Singh, Ruben Etienne Johan Rinus Vandervelden | 2023-10-17 |
| 11609503 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Paul Corné Henri DE WIT | 2023-03-21 |
| 11561479 | Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method | Bas JANSEN, Cornelius Adrianus Lambertus De Hoon | 2023-01-24 |
| 11543756 | Lithographic apparatus and method | — | 2023-01-03 |