Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11561479 | Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method | Hans Butler, Bas JANSEN | 2023-01-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11561479 | Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method | Hans Butler, Bas JANSEN | 2023-01-24 |