Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789373 | Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method | Samer Abdelmoeti Abuzeid Abdelmoeti, Hans Butler, Koen Johan Frederik Loonen, Aditya Singh, Ruben Etienne Johan Rinus Vandervelden | 2023-10-17 |
| 11561479 | Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon | 2023-01-24 |