Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789373 | Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method | Bas JANSEN, Hans Butler, Koen Johan Frederik Loonen, Aditya Singh, Ruben Etienne Johan Rinus Vandervelden | 2023-10-17 |