Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11719529 | Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus | Maarten Jozef Jansen, Manoj Kumar MRIDHA | 2023-08-08 |
| 11609503 | Lithographic apparatus | Hans Butler, Paul Corné Henri DE WIT | 2023-03-21 |