Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11719529 | Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus | Manoj Kumar MRIDHA, Engelbertus Antonius Fransiscus Van Der Pasch | 2023-08-08 |
| 11556066 | Stage system and lithographic apparatus | Frank Auer | 2023-01-17 |