Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11719529 | Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus | Maarten Jozef Jansen, Engelbertus Antonius Fransiscus Van Der Pasch | 2023-08-08 |