Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828585 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Henricus Petrus Maria Pellemans | 2023-11-28 |
| 11822254 | Metrology apparatus and a method of determining a characteristic of interest | Ronald Joseph Antonius Van Den Oetelaar | 2023-11-21 |
| 11815675 | Metrology device and phase modulator apparatus therefor comprising a first moving grating and a first compensatory grating element | Simon Reinald HUISMAN | 2023-11-14 |
| 11803130 | Phase modulators in alignment to decrease mark size | Franciscus Godefridus Casper Bijnen, Muhsin Eralp, Simon Reinald HUISMAN | 2023-10-31 |
| 11703772 | Recipe selection based on inter-recipe consistency | Timothy Dugan Davis, Peter David Engblom, Kaustuve Bhattacharyya | 2023-07-18 |
| 11650047 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Vasco Tomas Tenner, Hugo Augustinus Joseph Cramer, Patrick Warnaar, Grzegorz Grzela +1 more | 2023-05-16 |
| 11644428 | Diffraction based overlay metrology tool and method of diffraction based overlay metrology | — | 2023-05-09 |
| 11640116 | Metrology method, computer product and system | Kaustuve Bhattacharyya | 2023-05-02 |
| 11619595 | Diffraction based overlay metrology tool and method of diffraction based overlay metrology | — | 2023-04-04 |
| 11549806 | Metrology apparatus | Marinus Johannes Maria Van Dam, Nitesh Pandey | 2023-01-10 |