Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815675 | Metrology device and phase modulator apparatus therefor comprising a first moving grating and a first compensatory grating element | Arie Jeffrey Den Boef | 2023-11-14 |
| 11803130 | Phase modulators in alignment to decrease mark size | Franciscus Godefridus Casper Bijnen, Muhsin Eralp, Arie Jeffrey Den Boef | 2023-10-31 |
| 11762305 | Alignment method | Sergei Sokolov, Filippo ALPEGGIANI, Sebastianus Adrianus GOORDEN | 2023-09-19 |
| 11556068 | Detection system for an alignment sensor | — | 2023-01-17 |