Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762305 | Alignment method | Sergei Sokolov, Filippo ALPEGGIANI, Simon Reinald HUISMAN | 2023-09-19 |
| 11650513 | Apparatus and method for measuring a position of a mark | — | 2023-05-16 |