Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841626 | Alignment sensor based on wavelength-scanning | — | 2023-12-12 |
| 11803130 | Phase modulators in alignment to decrease mark size | Franciscus Godefridus Casper Bijnen, Simon Reinald HUISMAN, Arie Jeffrey Den Boef | 2023-10-31 |