Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709436 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patrick Warnaar, Vasco Tomas Tenner, Maurits Van Der Schaar | 2023-07-25 |
| 11650047 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Vasco Tomas Tenner, Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Patrick Warnaar, Grzegorz Grzela +1 more | 2023-05-16 |