Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709436 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Patrick Warnaar, Vasco Tomas Tenner | 2023-07-25 |
| 11698346 | Methods and apparatus for monitoring a manufacturing process, inspection apparatus, lithographic system, device manufacturing method | Ioana Sorina Barbu, Murat Bozkurt, Alberto Da Costa Assafrao | 2023-07-11 |
| 11580274 | Method and apparatus for inspection and metrology | Lotte Marloes Willems, Kaustuve Bhattacharyya, Panagiotis Pieter Bintevinos, Guangqing Chen, Martin Ebert +5 more | 2023-02-14 |