Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11698346 | Methods and apparatus for monitoring a manufacturing process, inspection apparatus, lithographic system, device manufacturing method | Murat Bozkurt, Maurits Van Der Schaar, Alberto Da Costa Assafrao | 2023-07-11 |