Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828585 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2023-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828585 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2023-11-28 |