Issued Patents 2023
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815803 | Multilayer extreme ultraviolet reflector materials | Wen Xiao, Binni Varghese | 2023-11-14 |
| 11789358 | Extreme ultraviolet mask blank defect reduction | Wen Xiao, Weimin Li, Sanjay Bhat, Azeddine Zerrade | 2023-10-17 |
| 11782337 | Multilayer extreme ultraviolet reflectors | Wen Xiao, Herng Yau Yoong | 2023-10-10 |
| 11762278 | Multilayer extreme ultraviolet reflectors | Herng Yau Yoong, Wen Xiao | 2023-09-19 |
| 11754917 | Extreme ultraviolet mask blank with multilayer absorber and method of manufacture | — | 2023-09-12 |
| 11720013 | Graded interface in Bragg reflector | Wen Xiao, Weimin Li, Shuwei Liu | 2023-08-08 |
| 11675263 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu | 2023-06-13 |
| 11669008 | Extreme ultraviolet mask blank defect reduction methods | Wen Xiao, Sanjay Bhat, Shiyu Liu, Binni Varghese, Azeddine Zerrade | 2023-06-06 |
| 11668003 | Deposition system with a multi-cathode | Sanjay Bhat | 2023-06-06 |
| 11644741 | Extreme ultraviolet mask absorber materials | Shuwei Liu | 2023-05-09 |
| 11639544 | Physical vapor deposition system and processes | Sanjay Bhat, Wen Xiao | 2023-05-02 |
| 11640109 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu, Azeddine Zerrade, Ramya Ramalingam | 2023-05-02 |
| 11630385 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Wen Xiao, Azeddine Zerrade | 2023-04-18 |
| 11609490 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu | 2023-03-21 |
| 11604151 | Surface topography measurement apparatus and method | Weimin Li, Wen Xiao, Sanjay Bhat | 2023-03-14 |
| 11599016 | Physical vapor deposition system and processes | Wen Xiao, Sanjay Bhat | 2023-03-07 |
| 11592738 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu | 2023-02-28 |
| 11556053 | Extreme ultraviolet mask blank hard mask materials | Shuwei Liu, Wen Xiao, Azeddine Zerrade | 2023-01-17 |
| 11557473 | System and method to control PVD deposition uniformity | Wen Xiao, Sanjay Bhat | 2023-01-17 |
| 11542595 | Physical vapor deposition system and processes | Wen Xiao, Sanjay Bhat | 2023-01-03 |