Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789358 | Extreme ultraviolet mask blank defect reduction | Wen Xiao, Vibhu Jindal, Weimin Li, Azeddine Zerrade | 2023-10-17 |
| 11668003 | Deposition system with a multi-cathode | Vibhu Jindal | 2023-06-06 |
| 11669008 | Extreme ultraviolet mask blank defect reduction methods | Wen Xiao, Shiyu Liu, Binni Varghese, Vibhu Jindal, Azeddine Zerrade | 2023-06-06 |
| 11639544 | Physical vapor deposition system and processes | Vibhu Jindal, Wen Xiao | 2023-05-02 |
| 11604151 | Surface topography measurement apparatus and method | Weimin Li, Wen Xiao, Vibhu Jindal | 2023-03-14 |
| 11599016 | Physical vapor deposition system and processes | Vibhu Jindal, Wen Xiao | 2023-03-07 |
| 11557473 | System and method to control PVD deposition uniformity | Wen Xiao, Vibhu Jindal | 2023-01-17 |
| 11542595 | Physical vapor deposition system and processes | Wen Xiao, Vibhu Jindal | 2023-01-03 |