Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789358 | Extreme ultraviolet mask blank defect reduction | Wen Xiao, Vibhu Jindal, Weimin Li, Sanjay Bhat | 2023-10-17 |
| 11669008 | Extreme ultraviolet mask blank defect reduction methods | Wen Xiao, Sanjay Bhat, Shiyu Liu, Binni Varghese, Vibhu Jindal | 2023-06-06 |
| 11640109 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu, Vibhu Jindal, Ramya Ramalingam | 2023-05-02 |
| 11630385 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Wen Xiao, Vibhu Jindal | 2023-04-18 |
| 11556053 | Extreme ultraviolet mask blank hard mask materials | Shuwei Liu, Wen Xiao, Vibhu Jindal | 2023-01-17 |