Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640109 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu, Vibhu Jindal, Azeddine Zerrade | 2023-05-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640109 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Shiyu Liu, Vibhu Jindal, Azeddine Zerrade | 2023-05-02 |