Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720013 | Graded interface in Bragg reflector | Wen Xiao, Vibhu Jindal, Weimin Li | 2023-08-08 |
| 11675263 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2023-06-13 |
| 11644741 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2023-05-09 |
| 11640109 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal, Azeddine Zerrade, Ramya Ramalingam | 2023-05-02 |
| 11630385 | Extreme ultraviolet mask absorber materials | Wen Xiao, Vibhu Jindal, Azeddine Zerrade | 2023-04-18 |
| 11609490 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2023-03-21 |
| 11592738 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2023-02-28 |
| 11556053 | Extreme ultraviolet mask blank hard mask materials | Wen Xiao, Vibhu Jindal, Azeddine Zerrade | 2023-01-17 |