Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424141 | Substrate processing apparatus, substrate processing method and recording medium | Jian Zhang, Hisashi Kawano, Seigo Fujitsu, Hideaki Sato, Teruaki Konishi +3 more | 2022-08-23 |
| 11309194 | Substrate liquid treatment apparatus | Koji Tanaka, Toshiyuki Shiokawa, Koji Yamashita, Hiroyuki Masutomi, Hitoshi Kosugi +2 more | 2022-04-19 |
| 11257692 | Substrate processing apparatus, mixing method, and substrate processing method | Kouji Ogura, Jun Nonaka, Yoshinori Nishiwaki, Hiroshi Yoshida | 2022-02-22 |