Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282727 | Control device of substrate processing apparatus and control method of substrate processing apparatus | — | 2022-03-22 |
| 11257692 | Substrate processing apparatus, mixing method, and substrate processing method | Kouji Ogura, Takao Inada, Yoshinori Nishiwaki, Hiroshi Yoshida | 2022-02-22 |