Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353894 | Liquid processing apparatus and liquid processing method | Keigo Satake, Hiroshi Komiya | 2022-06-07 |
| 11257692 | Substrate processing apparatus, mixing method, and substrate processing method | Jun Nonaka, Takao Inada, Yoshinori Nishiwaki, Hiroshi Yoshida | 2022-02-22 |