Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424141 | Substrate processing apparatus, substrate processing method and recording medium | Jian Zhang, Takao Inada, Hisashi Kawano, Seigo Fujitsu, Hideaki Sato +3 more | 2022-08-23 |