Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515178 | System and methods for wafer drying | Trace Hurd, Antonio Luis Pacheco Rotondaro, Derek Bassett | 2022-11-29 |
| 11309194 | Substrate liquid treatment apparatus | Koji Tanaka, Toshiyuki Shiokawa, Koji Yamashita, Hiroyuki Masutomi, Takao Inada +2 more | 2022-04-19 |
| 11217451 | Substrate processing method and substrate processing apparatus | Shota Umezaki, Kouzou Tachibana, Ryo Yamamoto | 2022-01-04 |