KT

Kouzou Tachibana

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #369,204 of 548,613Top 70%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11217451 Substrate processing method and substrate processing apparatus Hitoshi Kosugi, Shota Umezaki, Ryo Yamamoto 2022-01-04