Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373883 | Substrate processing apparatus, substrate processing system and substrate processing method | Yoshinori Ikeda | 2022-06-28 |
| 11217451 | Substrate processing method and substrate processing apparatus | Hitoshi Kosugi, Kouzou Tachibana, Ryo Yamamoto | 2022-01-04 |