Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11428300 | Electric actuator | Shinsuke Hirano, Tatsunori Shimizu | 2022-08-30 |
| 11373883 | Substrate processing apparatus, substrate processing system and substrate processing method | Shota Umezaki | 2022-06-28 |
| 11320569 | Optical element for terahertz waves and manufacturing method of the same | Yoichi Kawada, Hironori Takahashi, Junshi SOEDA | 2022-05-03 |