Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424141 | Substrate processing apparatus, substrate processing method and recording medium | Jian Zhang, Takao Inada, Hisashi Kawano, Seigo Fujitsu, Hideaki Sato +3 more | 2022-08-23 |
| 11309194 | Substrate liquid treatment apparatus | Koji Tanaka, Koji Yamashita, Hiroyuki Masutomi, Hitoshi Kosugi, Takao Inada +2 more | 2022-04-19 |