Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454890 | Composition for resist underlayer film formation, resist underlayer film and forming method thereof, patterned substrate-producing method, and compound | Yuushi MATSUMURA, Hiroki Nakatsu, Kazunori Takanashi, Hiroki Nakagawa | 2022-09-27 |
| 11320739 | Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate | Goji Wakamatsu, Tsubasa Abe, Kazunori Sakai, Yuushi MATSUMURA, Hayato Namai | 2022-05-03 |
| 11243468 | Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method | Goji Wakamatsu, Tsubasa Abe, Ichihiro Miura, Kengo EHARA, Hiroki Nakatsu +1 more | 2022-02-08 |