Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11243468 | Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production method | Naoya Nosaka, Goji Wakamatsu, Tsubasa Abe, Kengo EHARA, Hiroki Nakatsu +1 more | 2022-02-08 |
| 11215928 | Composition for resist underlayer film formation, resist underlayer film and method for forming the same, and production method of a patterned substrate | Kazunori Takanashi, Hiroki Nakatsu, Kazunori Sakai | 2022-01-04 |