Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11320739 | Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate | Goji Wakamatsu, Naoya Nosaka, Tsubasa Abe, Yuushi MATSUMURA, Hayato Namai | 2022-05-03 |
| 11215928 | Composition for resist underlayer film formation, resist underlayer film and method for forming the same, and production method of a patterned substrate | Kazunori Takanashi, Hiroki Nakatsu, Ichihiro Miura | 2022-01-04 |