Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454890 | Composition for resist underlayer film formation, resist underlayer film and forming method thereof, patterned substrate-producing method, and compound | Naoya Nosaka, Hiroki Nakatsu, Kazunori Takanashi, Hiroki Nakagawa | 2022-09-27 |
| 11320739 | Composition for resist underlayer film formation, resist underlayer film and method for producing patterned substrate | Goji Wakamatsu, Naoya Nosaka, Tsubasa Abe, Kazunori Sakai, Hayato Namai | 2022-05-03 |