Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480866 | Method and apparatus to anneal EUV mask blank | Herng Yau Yoong, Wen Xiao, Sanjay Bhat, Vibhu Jindal | 2022-10-25 |
| 11469124 | Contactless latch and coupling for vacuum wafer transfer cassette | Shreyas Patil Shanthaveeraswamy, Kumaresan Nagarajan, Vijay Singh, Andrew J. Constant, Michael P. Karazim +1 more | 2022-10-11 |
| 11361981 | Batch substrate support with warped substrate capability | Shashidhara Patel, Ananthkrishna Jupudi | 2022-06-14 |