Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398397 | Electrostatic chuck and plasma processing apparatus including the same | YongWoo Lee, Youngjin Noh, Myungsun Choi, Seungbo Shim, Jaehak Lee | 2022-07-26 |
| 11282679 | Plasma control apparatus and plasma processing system including the same | Donghyeon Na, Hyosin KIM, Seungbo Shim, Hadong JIN, Dougyong Sung | 2022-03-22 |