Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Daniel Wack, Oleg Khodykin, Andrei V. Shchegrov, Alexander Kuznetsov, Nikolay Artemiev | 2022-05-17 |
| 11268901 | Variable aperture mask | Barry Blasenheim, Noam Sapiens, Pablo I. Rovira | 2022-03-08 |
| 11272607 | Laser produced plasma illuminator with low atomic number cryogenic target | Chao Chang, Jongjin Kim, Will Schumaker, Ben Clarke | 2022-03-08 |
| 11259394 | Laser produced plasma illuminator with liquid sheet jet target | Chao Chang, Will Schumaker, Jongjin Kim | 2022-02-22 |