Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512387 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Jothilingam Ramalingam, Jianxin Lei | 2022-11-29 |
| 11492697 | Apparatus for improved anode-cathode ratio for rf chambers | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Chandrashekar Kenchappa, Martin Lee Riker | 2022-11-08 |
| 11339466 | Heated shield for physical vapor deposition chamber | Ilya Lavitsky, Goichi Yoshidome | 2022-05-24 |
| D941371 | Process shield for a substrate processing chamber | Ilya Lavitsky, Goichi Yoshidome | 2022-01-18 |
| D941372 | Process shield for a substrate processing chamber | Ilya Lavitsky, Goichi Yoshidome | 2022-01-18 |