Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339466 | Heated shield for physical vapor deposition chamber | Ilya Lavitsky, Keith A. Miller | 2022-05-24 |
| D941371 | Process shield for a substrate processing chamber | Ilya Lavitsky, Keith A. Miller | 2022-01-18 |
| D941372 | Process shield for a substrate processing chamber | Ilya Lavitsky, Keith A. Miller | 2022-01-18 |