Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D970566 | Sputter target for a physical vapor deposition chamber | Martin Lee Riker, William Fruchterman, Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH | 2022-11-22 |
| 11339466 | Heated shield for physical vapor deposition chamber | Keith A. Miller, Goichi Yoshidome | 2022-05-24 |
| D941371 | Process shield for a substrate processing chamber | Keith A. Miller, Goichi Yoshidome | 2022-01-18 |
| D941372 | Process shield for a substrate processing chamber | Keith A. Miller, Goichi Yoshidome | 2022-01-18 |