Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469571 | Fast phase-shift interferometry by laser frequency shift | Haifeng Huang, Rui-fang Shi | 2022-10-11 |
| 11333621 | Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction | Oleg Khodykin, Andrei V. Shchegrov, Alexander Kuznetsov, Nikolay Artemiev, Michael Friedmann | 2022-05-17 |