Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515155 | Methods for enhancing selectivity in SAM-based selective deposition | Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang, David Thompson +3 more | 2022-11-29 |
| 11508610 | Substrate support with edge seal | Bonnie T. Chia, Song-Moon Suh, Cheng-Hsiung Tsai, Yuanhong Guo, Lei Zhou +1 more | 2022-11-22 |
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Song-Moon Suh | 2022-09-13 |