Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417496 | Stage device, charged particle beam apparatus, and vacuum apparatus | Motohiro TAKAHASHI, Takanori Kato, Naruo Watanabe | 2022-08-16 |
| 11342156 | Charged particle beam apparatus, sample alignment method of charged particle beam apparatus | Masaki Mizuochi, Shuichi Nakagawa, Motohiro TAKAHASHI | 2022-05-24 |
| 11342211 | Wafer inspection apparatus and wafer inspection method | Akira Doi, Minoru Sasaki, Masaki Hasegawa, Tomohiko Ogata, Yuko Okada | 2022-05-24 |