Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11418101 | Linear motor for vacuum and vacuum processing apparatus | Tomotaka SHIBAZAKI | 2022-08-16 |
| 11380515 | Charged particle beam device | Keiichiro HOSOBUCHI, Shuichi Nakagawa, Tomotaka SHIBAZAKI, Takaaki Kikuchi | 2022-07-05 |
| 11342156 | Charged particle beam apparatus, sample alignment method of charged particle beam apparatus | Hironori Ogawa, Shuichi Nakagawa, Motohiro TAKAHASHI | 2022-05-24 |