Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417496 | Stage device, charged particle beam apparatus, and vacuum apparatus | Motohiro TAKAHASHI, Takanori Kato, Hironori Ogawa | 2022-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417496 | Stage device, charged particle beam apparatus, and vacuum apparatus | Motohiro TAKAHASHI, Takanori Kato, Hironori Ogawa | 2022-08-16 |